Nicolet ECO-6700 FTIR, 8"/12" Wafer Profiling System, Ellipsometer Metrology

Description

Up for sale is a Thermo Nicolet ECO-6700 FT-IR Silicon Wafer Profiling System.  The Nicolet ECO-6700 includes a Pike MAP300 automated /integrated wafer profiling stage and ECO FT-IR metrology software for the most common semiconductor wafer measurements. This Nicolet ECO-6700 is used for many different measurements of wafers ranging from 50 mm to 300 mm, as well as irregularly shaped pieces of wafers. The system also supports single point analysis, multi-point analysis and unattended complete wafer profiling.
Nicolet ECO-6700 Features
• Transmission and reflection measurement modes
• Manual wafer loading
• Unattended wafer profiling
• Auto-alignment and dynamic alignment of interferometer
• High power Ever-Glo™ source
• Optics optimized for wafer analysis
• PC controlled AUTOMATION:  50 – 300 mm (Wafer sizes:2,4,6,8,12-inches)
• Thickness measurements
– Epitaxial films, MEMS devices, SOI, polysilicon, and III-V films
– Interferogram subtract method for thick films – Cepstrum method for thin films
• Interstitial oxygen and substitutional carbon levels in silicon
– Support for ASTM, JEIDA, and DIN methods
• Dielectric film characterization
– Dopant concentrations in BPSG, PSG, and FSG films
– Hydrogen concentrations in SiN and SiON films
SALE Includes:
(*See All Photos)
Nicolet ECO-6700 FT-IR Spectrometer
Pike MAP300 Wafer Accessory
MAP300 Controller Unit
12-inch(300-mm) Wafer Mount
Insert, 8-inch(200-mm) Wafer
Insert, 8-inch(200-mm) Rectangle Wafer
Insert, 6-inch(150-mm) Wafer
Insert, 4-inch(100-mm) Wafer
MAP300 Alignment Mirror
Dell Core-2 Control Computer
ECO-6700 Program Software installed
MAP300 User Manual, PDF
Connecting Cables & Purge Tubes
Miscellaneous Items
-- a PC monitor shown is not for sale (display only)
OPTIONS:
Buyer's Inspection & Pickup available at our facility.
System Installation available at a service fee.
PAYMENT & SHIPPING:
Payment for the item is due within 3 days of the auctions ending date.  We ship worldwide. Please message us for details of air-freight estimate and shipping options: crate, freight and insurance.